Semiconductor and spray sensing

Our Tactile Sensing technology has allowed semiconductor manufacturers to improve tolerances in manufacturing and produce wafers with more precision and accuracy. This application of low-pressure sensors has fueled products that optimize semiconductor polishing disk pressures while significantly reducing tilt errors. The Spray Sensor allows for precision measurement of spray pattern and distribution from wafer cleaning sprays, allowing for identification of the optimal spray power to reduce the likelihood of wafer damage while ensuring proper wafer cleaning. The ultra-low-pressure sensitivity of the Spray Sensor allows for precision measurement, testing, and refinement of cleaning sprays, aerosol nozzles, and any other application involving low pressure or pattern distribution.

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Spray Sensor

The spray sensor is a sensitive, waterproof capacitive tactile sensor array designed to capture instantaneous and actionable spray pattern and spray pressure data generated by sprayed fluids or gases. This sensor can be delivered in one of two application variants: Spray Pressure or Spray Pattern.

The Spray Pressure System captures distribution and impact pressure. The Spray Pattern System accurately identifies the location where sprayed fluid or gases land, by comparing electrical properties of the air surface to that of the spray. This technology is optimal for use in situations where spray pressures are infinitesimally small.

 

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